Optimization of Hydride Vapor Phase Epitaxy (HVPE) Deposition Reactor manufacturing III-V Materials using multiple Large-Eddy Simulations (LES)

Published in AIChE Annual Meeting, 2020

Recommended citation: Hassanaly, Malik and Sitaraman, Hari and Udwary, Kevin and Schulte, Kevin L. and Splawn, Heather and Ptak, Aaron and Simon (2020). " Optimization of Hydride Vapor Phase Epitaxy (HVPE) Deposition Reactor Manufacturing III-V Materials Using Multiple Large-Eddy Simulations (LES)." AIChE Annual Meeting. /files/pdf/dhvpe_aiche.pdf